Suppressing low-order eigenmodes with local control for deformable mirrors
نویسندگان
چکیده
منابع مشابه
MEMS Deformable Mirrors for Astronomical Adaptive Optics
We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...
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